450-4010/02 – Microsensors and Special Measurement (MSM)
| Gurantor department | Department of Cybernetics and Biomedical Engineering | Credits | 5 |
| Subject guarantor | doc. Ing. Bohumil Horák, Ph.D. | Subject version guarantor | doc. Ing. Bohumil Horák, Ph.D. |
| Study level | undergraduate or graduate | Requirement | Optional |
| Year | | Semester | winter |
| | Study language | English |
| Year of introduction | 2015/2016 | Year of cancellation | |
| Intended for the faculties | FEI | Intended for study types | Follow-up Master |
Subject aims expressed by acquired skills and competences
Students will be acquainted with this promising group microelectronic components - microelectronic sensors and their application in measuring non-electrical quantities, enabling them to focus on the issue of automatic acquisition of initial information management systems in industry, medical engineering, robotics and navigation.
Students will be acquainted with this promising group microelectronic components - microelectronic sensors and their application in measuring non-electrical quantities.
Teaching methods
Lectures
Individual consultations
Experimental work in labs
Project work
Summary
Microelectronic sensors are characterized as sensors using phenomena in semiconductors and layer structures made microelectronic technologies. They represent a progressive, worldwide dynamic growth number of types of sensors, known as sensors 2.generation.This type of sensor is compatible with integrated circuits in terms of both technological as well as the perimeter, which make full use of opportunities provided by microelectronics (higher reliability, lower price for smaller dimensions and weight, new circuit innovative solutions and applications).
The course is devoted to areas:
- Basic principles, features and design solutions microelectronic sensors (MS)
- Manufacturing processes used in the manufacture of MS.
- MS in industry, medicine and environmental protection
Compulsory literature:
Recommended literature:
Additional study materials
Way of continuous check of knowledge in the course of semester
Verification of study:
During the semester student prepare 10 laboratory tasks, in order to practical verify lectured theory and taught a semester project. Semestral project goal is to demonstrate the ability to apply lectured theory at problems of practical tasks.
The course is completed the final exam.
Terms of the credit:
During the semester student prepares measurements from 10 laboratory tasks. For each laboratory task can get max. 3 points. Total per semester can get max. 30 points.
The condition for obtaining credit is getting min. 15 points.
Final Exam:
Condition for admission to the examination is completion of credit. The exam scores are counted semester project for which you can get max.20 points. The final exam consists of written (max. 40 points) and an oral (max. 10 points).
E-learning
Other requirements
There are not defined other requirements for student
Prerequisities
Subject has no prerequisities.
Co-requisities
Subject has no co-requisities.
Subject syllabus:
Lectures:
Microelectronic sensors definitions. Comparison of properties of conventional sensors and microelectronic sensors . The role of technology in manufacturing process developing of senzors. Production steps in manufacturing od microelectronic sensors.
Planar technology and its use in the manufacture of microelectronic sensors. Micromechanics. Mechanical processing of materials compatible with microelectronic processes of microelekctronic elements production. Micromechanical structures and their use in the construction of microelectronic sensors.
Microelectronic sensors of mechanical signals. Microelectronic pressure sensors and accelerometers.
Microelectronic sensors of thermal quantities. Semiconductor temperature sensors. Microelectronic Thermoblocks. The use of microelectronic sensors for measuring quantities of heat flow, vacuum and IR radiation.
Microelectronic sensors magnetic properties. Integrated magnetic Hall sensors. Magnetorezistors. Magnetodiods and magnetotranzistors. Microelectronic sensors using pellet domain phenomenon
Microelectronic sensors of radiation signals. Non-ionizing radiation detectors. Spectral characteristics of photoelectric sensors and its possible influence. Photoconductive and photovoltaic effect and its use in construction of microlektronic sensors. Avalanche photodiodes, PIN diodes and their characteristics. Photoelectric position sensor-PSD.
Image sensors. Image sensors of visible radiation.
X-Y-addressed sensors. CCD image sensor with line transmission. CCD image sensor with image transmission.
Microelectronic thermal systems. CCD infrared systems with pyroelectric detectors. CCD quant thermal systems.
Radiation. Silicium ionizing detectors and germanium detectors. Transients and Surface Barrier detectors. Anular position sensitive detectors. Transmission detectors. Microstrip detectors and their use for measuring for measuring high-energy particles.
Microelectronic sensors of chemical properties. Sensors type ChemFET, IS FET. Chemoresistors. Chemical sensors using surface acoustic wave (SAW. detectors of hmidityi. Integrated oxygen sensors. Biosensors.
Processing of sensor signals. Multisensor array. SMART sensors.
Microelectronic Sensor Applications in industry (automotive, robotics, etc.).
Conditions for subject completion
Occurrence in study plans
Occurrence in special blocks
Assessment of instruction
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