455-0347/01 – Manufacturing of Microelectronic Devices (VMP)

Gurantor departmentDepartment of Measurement and ControlCredits4
Subject guarantordoc. Ing. Milan Hutyra, CSc.Subject version guarantordoc. Ing. Milan Hutyra, CSc.
Study levelundergraduate or graduateRequirementChoice-compulsory
YearSemestersummer
Study languageCzech
Year of introduction2003/2004Year of cancellation2005/2006
Intended for the facultiesFEIIntended for study typesMaster
Instruction secured by
LoginNameTuitorTeacher giving lectures
HUT90 doc. Ing. Milan Hutyra, CSc.
Extent of instruction for forms of study
Form of studyWay of compl.Extent
Full-time Credit and Examination 2+2
Combined Credit and Examination 2+2

Subject aims expressed by acquired skills and competences

To aquire the students about the basics of solid state technology used in manufacturing of microelectronic devices (ICs and microelectronic sensors)

Teaching methods

Summary

Microtechnology brings about basic changes in research and development of new generation of electronic elements both for processing of electric signal and for microelectronic sensors . The subject is dedicated to the area: materials for microelectronic devices manufacturing, basics of solid state technoloy , assembly of microeletronic devices, diagnostic method used in manufacturing of microeletronic devices, basic structure of IC´s and microelectronic sensors

Compulsory literature:

VLSI Technology -edited by S.M.Sze, McGraw-Hill Book Comp.,1993. A.S.Grove physics and Technology of Semiconductor Devices, John Wiley and Sons Inc. 1967 S.Wolf, R.N.Tauber : Silicon Processing for VLSI ERA -Process technology, , Lattice Press 1990

Recommended literature:

From Silica to Silicon, CD training material, TESLA SEZAM 2001 Bipolar technology, CD training material, Tesla SEZAM, 2001

Way of continuous check of knowledge in the course of semester

E-learning

Další požadavky na studenta

Prerequisities

Subject has no prerequisities.

Co-requisities

Subject has no co-requisities.

Subject syllabus:

Lectures: The position and the role of technology in microeletronic device manufacturing. The contents of microtechnology. Silicon based microtechnology. Physics of semiconductor. Technology of monolithic ICs. Bipolar technology, planar-epitaxy, isoplanar, CDI. Unipolar technology, CMOS , BiCMOS . Materials used for manufacturing of microelectronic devices, clean rooms. Characterization and technology of semiconductor materials. Manufacturing of poly and single-crystal silicon. Manufacturing of silicon wafers. Basics of solid state technology. Physical and chemical methods of thin film preparation. Epitaxial film growth. CVD deposition. Introducing dopant technology. Thermal diffusion. Ion implantation. Method of processing of layers. Lithography. Chemical etching of of thin films. Plasma and ion etching of thin films. Testing in wafer technology. In-process testing. PC testing. Probe testing. Assembly of microelectronic devices. Die assembly. Multimodul assembly. Diagnostic methods in semiconductor device manufacturing. Reliability programs. Methodology of ICs design. Device modeling, process modeling. Microelectronic sensors manufacturing. Exercises: Semiconductor physic basic calculation: number of atoms in volum unit, concentration of electrons and holes, specific resistivity. Semiconductor physic basic calculation:calculation of Fermi level, mobility of carriers. Measurement of physical properties of semiconductors. Solid state technology journals. Solid state technology journals - continue TESLA SEZAM CD training material - From silica to silicon TESLA SEZAM CD training material - Bipolar technology I TESLA SEZAM CD training material - Bipolar technology II The visit of wafer fab and assembly.

Conditions for subject completion

Full-time form (validity from: 1960/1961 Summer semester)
Task nameType of taskMax. number of points
(act. for subtasks)
Min. number of points
Exercises evaluation and Examination Credit and Examination 100 (100) 51
        Exercises evaluation Credit 40 (40) 0
                Laboratory work Laboratory work 10  0
                Written exam Written test 10  0
                Other task type Other task type 20  0
        Examination Examination 60 (60) 0
                Written examination Written examination 40  0
                Oral Oral examination 20  0
Mandatory attendence parzicipation:

Show history

Occurrence in study plans

Academic yearProgrammeField of studySpec.FormStudy language Tut. centreYearWSType of duty
2007/2008 (M2612) Electrical Engineering and Computer Science (2612T018) Electronics and Communication Technology P Czech Ostrava Choice-compulsory study plan
2007/2008 (M2612) Electrical Engineering and Computer Science (2642T004) Electrical Machines, Apparatus and Drives (10) Elektrické stroje a přístroje P Czech Ostrava Choice-compulsory study plan
2007/2008 (M2612) Electrical Engineering and Computer Science (2642T004) Electrical Machines, Apparatus and Drives (20) Elektrické pohony a výkonová elektronika P Czech Ostrava Choice-compulsory study plan
2007/2008 (M2612) Electrical Engineering and Computer Science (3902T023) Computer Science P Czech Ostrava Choice-compulsory study plan
2006/2007 (M2612) Electrical Engineering and Computer Science (2601T004) Measurement and Control Engineering P Czech Ostrava Choice-compulsory study plan
2006/2007 (M2612) Electrical Engineering and Computer Science (2612T018) Electronics and Communication Technology P Czech Ostrava Choice-compulsory study plan
2006/2007 (M2612) Electrical Engineering and Computer Science (2642T004) Electrical Machines, Apparatus and Drives (10) Elektrické stroje a přístroje P Czech Ostrava Choice-compulsory study plan
2006/2007 (M2612) Electrical Engineering and Computer Science (2642T004) Electrical Machines, Apparatus and Drives (20) Elektrické pohony a výkonová elektronika P Czech Ostrava Choice-compulsory study plan
2006/2007 (M2612) Electrical Engineering and Computer Science (3902T023) Computer Science P Czech Ostrava Choice-compulsory study plan
2006/2007 (M2612) Electrical Engineering and Computer Science (3907T001) Electrical Power Engineering P Czech Ostrava Choice-compulsory study plan
2005/2006 (M2612) Electrical Engineering and Computer Science (2601T004) Measurement and Control Engineering P Czech Ostrava Choice-compulsory study plan
2005/2006 (M2612) Electrical Engineering and Computer Science (2612T018) Electronics and Communication Technology P Czech Ostrava Choice-compulsory study plan
2005/2006 (M2612) Electrical Engineering and Computer Science (2642T004) Electrical Machines, Apparatus and Drives (10) Elektrické stroje a přístroje P Czech Ostrava Choice-compulsory study plan
2005/2006 (M2612) Electrical Engineering and Computer Science (2642T004) Electrical Machines, Apparatus and Drives (20) Elektrické pohony a výkonová elektronika P Czech Ostrava Choice-compulsory study plan
2005/2006 (M2612) Electrical Engineering and Computer Science (3902T023) Computer Science P Czech Ostrava Choice-compulsory study plan
2005/2006 (M2612) Electrical Engineering and Computer Science (3907T001) Electrical Power Engineering P Czech Ostrava Choice-compulsory study plan
2004/2005 (M2612) Electrical Engineering and Computer Science (2601T004) Measurement and Control Engineering P Czech Ostrava 3 Optional study plan
2004/2005 (N2645) Electrical Engineerong, Communication and Computer Systems (2612T041) Control and Informatics Systems P Czech Ostrava 2 Optional study plan
2004/2005 (M2612) Electrical Engineering and Computer Science (2601T004) Measurement and Control Engineering P Czech Ostrava Choice-compulsory study plan
2004/2005 (M2612) Electrical Engineering and Computer Science (2612T018) Electronics and Communication Technology P Czech Ostrava Choice-compulsory study plan
2004/2005 (M2612) Electrical Engineering and Computer Science (2642T004) Electrical Machines, Apparatus and Drives (10) Elektrické stroje a přístroje P Czech Ostrava Choice-compulsory study plan
2004/2005 (M2612) Electrical Engineering and Computer Science (2642T004) Electrical Machines, Apparatus and Drives (20) Elektrické pohony a výkonová elektronika P Czech Ostrava Choice-compulsory study plan
2004/2005 (M2612) Electrical Engineering and Computer Science (3902T023) Computer Science P Czech Ostrava Choice-compulsory study plan
2004/2005 (M2612) Electrical Engineering and Computer Science (3907T001) Electrical Power Engineering P Czech Ostrava Choice-compulsory study plan
2004/2005 (N2645) Electrical Engineerong, Communication and Computer Systems (2612T041) Control and Informatics Systems K Czech Ostrava 2 Optional study plan
2003/2004 (M2612) Electrical Engineering and Computer Science (2601T004) Measurement and Control Engineering P Czech Ostrava 3 Optional study plan
2003/2004 (N2645) Electrical Engineerong, Communication and Computer Systems (2612T041) Control and Informatics Systems P Czech Ostrava 2 Optional study plan
2003/2004 (M2612) Electrical Engineering and Computer Science (2601T004) Measurement and Control Engineering P Czech Ostrava Choice-compulsory study plan
2003/2004 (M2612) Electrical Engineering and Computer Science (2612T018) Electronics and Communication Technology P Czech Ostrava Choice-compulsory study plan
2003/2004 (M2612) Electrical Engineering and Computer Science (2642T004) Electrical Machines, Apparatus and Drives (10) Elektrické stroje a přístroje P Czech Ostrava Choice-compulsory study plan
2003/2004 (M2612) Electrical Engineering and Computer Science (2642T004) Electrical Machines, Apparatus and Drives (20) Elektrické pohony a výkonová elektronika P Czech Ostrava Choice-compulsory study plan
2003/2004 (M2612) Electrical Engineering and Computer Science (3902T023) Computer Science P Czech Ostrava Choice-compulsory study plan
2003/2004 (M2612) Electrical Engineering and Computer Science (3907T001) Electrical Power Engineering P Czech Ostrava Choice-compulsory study plan
2003/2004 (N2645) Electrical Engineerong, Communication and Computer Systems (2612T041) Control and Informatics Systems K Czech Ostrava 2 Optional study plan

Occurrence in special blocks

Block nameAcademic yearForm of studyStudy language YearWSType of blockBlock owner