455-0901/01 – Manufacturing of Microelectronic Devices (VMP)

Gurantor departmentDepartment of Measurement and ControlCredits0
Subject guarantordoc. Ing. Milan Hutyra, CSc.Subject version guarantordoc. Ing. Milan Hutyra, CSc.
Study levelpostgraduateRequirementChoice-compulsory
YearSemesterwinter + summer
Study languageCzech
Year of introduction1995/1996Year of cancellation2009/2010
Intended for the facultiesFEIIntended for study typesDoctoral
Extent of instruction for forms of study
Form of studyWay of compl.Extent
Full-time Credit and Examination 2+0
Combined Credit and Examination 2+0

Subject aims expressed by acquired skills and competences

To acquire the students about the basics of solid state technology used in manufacturing of microelectronic devices (ICs and microelectronic sensors)

Teaching methods

Summary

The subject is dedicated to the area: materials for microelectronic devices manufacturing basics of solid state technoloy diagnostic method used in IC´s manufacturing the structure of bipolar and unipolar IC

Compulsory literature:

VLSI Technology-edited by S.M.Sze,McGraw-Hill Book Comp.1983 A.S.Grove :Physics and Technology of Semiconductor Devices, John Wiley and Sons Inc. 1967

Recommended literature:

S.Wolf, R.N.Tauber : Silicon Processing for VLSI ERA -Process technology, , Lattice Press 1990 Bipolar technology, CD training material of TESLA SEZAM Fromsilica to silicon, CD training material of TESLA SEZAM

Way of continuous check of knowledge in the course of semester

E-learning

Další požadavky na studenta

Prerequisities

Subject has no prerequisities.

Co-requisities

Subject has no co-requisities.

Subject syllabus:

Lectures: Materials used for manufacturing of microelectronic devices, clean room. Silicon single/crystal grouth and wafering. Basics of solid state technology. Physical and chemical methods for preparation of thin film layers .Epitaxial growth. Introduction of dopants into silicon. Thermal diffusion and ion implantation. Method for processing of layers. Lithography. Chemical etching. Dry etching. Assembly of microelectronic devices. Testing and reliability programs. Diagnostic methods in semiconductor device manufacturing. Technology of bipolar and unipolar ICs. Planar technology. Isoplanar, I2L, CMOS, BiCMOS. Microtechnology as the technology for microelectronic sensor manufacturing. Micromaschining.

Conditions for subject completion

Full-time form (validity from: 1960/1961 Summer semester, validity until: 2012/2013 Summer semester)
Task nameType of taskMax. number of points
(act. for subtasks)
Min. number of points
Exercises evaluation and Examination Credit and Examination 100 (145) 51
        Examination Examination 100  0
        Exercises evaluation Credit 45  0
Mandatory attendence parzicipation:

Show history

Occurrence in study plans

Academic yearProgrammeField of studySpec.FormStudy language Tut. centreYearWSType of duty
2009/2010 (P2645) Electrical Engineering, Communication and Computer systems (2612V015) Electronics P Czech Ostrava Choice-compulsory study plan
2009/2010 (P2645) Electrical Engineering, Communication and Computer systems (2612V015) Electronics K Czech Ostrava Choice-compulsory study plan
2008/2009 (P2645) Electrical Engineering, Communication and Computer systems (2612V015) Electronics P Czech Ostrava Choice-compulsory study plan
2008/2009 (P2612) Electrical Engineering and Computer Science (2612V015) Electronics K Czech Ostrava Choice-compulsory study plan
2008/2009 (P2645) Electrical Engineering, Communication and Computer systems (2612V015) Electronics K Czech Ostrava Choice-compulsory study plan
2007/2008 (P2645) Electrical Engineering, Communication and Computer systems (2612V015) Electronics P Czech Ostrava Choice-compulsory study plan
2006/2007 (P2645) Electrical Engineering, Communication and Computer systems (2612V015) Electronics P Czech Ostrava Choice-compulsory study plan
2005/2006 (P2645) Electrical Engineering, Communication and Computer systems (2612V015) Electronics P Czech Ostrava Choice-compulsory study plan
2004/2005 (P2645) Electrical Engineering, Communication and Computer systems (2612V015) Electronics P Czech Ostrava Choice-compulsory study plan
2003/2004 (P2645) Electrical Engineering, Communication and Computer systems (2612V015) Electronics P Czech Ostrava Choice-compulsory study plan
2002/2003 (P2612) Electrical Engineering and Computer Science (2612V015) Electronics P Czech Ostrava Choice-compulsory study plan
2001/2002 (P2612) Electrical Engineering and Computer Science (2612V015) Electronics P Czech Ostrava Choice-compulsory study plan

Occurrence in special blocks

Block nameAcademic yearForm of studyStudy language YearWSType of blockBlock owner