455-0902/01 – Microelectronics Sensors (MES)

Gurantor departmentDepartment of Measurement and ControlCredits0
Subject guarantordoc. Ing. Milan Hutyra, CSc.Subject version guarantordoc. Ing. Milan Hutyra, CSc.
Study levelpostgraduateRequirementChoice-compulsory
YearSemesterwinter + summer
Study languageCzech
Year of introduction1995/1996Year of cancellation2009/2010
Intended for the facultiesFEIIntended for study typesDoctoral
Instruction secured by
LoginNameTuitorTeacher giving lectures
HUT90 doc. Ing. Milan Hutyra, CSc.
Extent of instruction for forms of study
Form of studyWay of compl.Extent
Full-time Credit and Examination 2+0
Combined Credit and Examination 2+0

Subject aims expressed by acquired skills and competences

The students acquire the information about perspective group of microelectronic devices - microelectronic sensors (MS) and their application for measurement of nonelectrical quantities.

Teaching methods

Summary

Microelectronic sensor (MS) are characterized as sensor based upon phenomena which occur in the semiconductor and in the thin and thich films and are fabricated by microtechnology. They present the progresive dynamic developing type of sensor called as "the second generation sensor". This kind of sensors are compatibile with integrated circuit not only form the point of view of technology but of design that enable fully to utilize the possibilities opered by microelectronic (higher reliolility excelent performance, price ,new design solutions and nontraditional application). The subject is dedicated to the areas: Basic physical principles of MS properties and design of MS, MS technology and application of MS industry, medical and enviroment protection.

Compulsory literature:

Guldan A. : Mikroelektronické senzory, ALFA 1988 Janata J., Huber R.J. :Solid State Sensors,Academic Press,Inc.1985. Middelhoek S., Audet S.: Silicon Sensors,Academic Press,Inc.1989. Ljubica Ristic: Senzor technology and Devices,Boston,London, 1994,ISBN 0-89006-532-2 Randy F.:Understanding smart sensors,Boston,London,1996, ISBN 0-89006-824-0

Recommended literature:

Way of continuous check of knowledge in the course of semester

E-learning

Další požadavky na studenta

Prerequisities

Subject has no prerequisities.

Co-requisities

Subject has no co-requisities.

Subject syllabus:

Lectures: Basic ideas and terminology. Mathematical and physical model of sensor. Characteristics of sensors. MS - their preferences and limitation. Microtechnology. IC technology, micromaschining. MS for machanical signals.Silicon pressure senosrs and accelerometers. Temperature compensation of pressure MS, method of trimming. Design of MS for mechanical signals. MS for thermal signals. Semiconductor temperature sensors. Thermoanemometers. Thermal feedback in microstructures and their utilization in MS design. MS for radiant signal, solid state imaging sensors. MS for nuclear - pacticle radiation. MS for chemical sensor. Semiconductor gas sensors. Chemicaly sensitive semiconductor devices CHEMFET, ISFET. Processing of sensor signals. Application of MS in industry automotive, and environment protection.

Conditions for subject completion

Full-time form (validity from: 1960/1961 Summer semester, validity until: 2012/2013 Summer semester)
Task nameType of taskMax. number of points
(act. for subtasks)
Min. number of points
Exercises evaluation and Examination Credit and Examination 100 (145) 51
        Examination Examination 100  0
        Exercises evaluation Credit 45  0
Mandatory attendence parzicipation:

Show history

Occurrence in study plans

Academic yearProgrammeField of studySpec.FormStudy language Tut. centreYearWSType of duty
2009/2010 (P2645) Electrical Engineering, Communication and Computer systems (2612V015) Electronics P Czech Ostrava Choice-compulsory study plan
2009/2010 (P2645) Electrical Engineering, Communication and Computer systems (2612V045) Technical Cybernetics P Czech Ostrava Choice-compulsory study plan
2009/2010 (P2645) Electrical Engineering, Communication and Computer systems (2612V015) Electronics K Czech Ostrava Choice-compulsory study plan
2009/2010 (P2645) Electrical Engineering, Communication and Computer systems (2612V045) Technical Cybernetics K Czech Ostrava Choice-compulsory study plan
2008/2009 (P2645) Electrical Engineering, Communication and Computer systems (2612V015) Electronics P Czech Ostrava Choice-compulsory study plan
2008/2009 (P2645) Electrical Engineering, Communication and Computer systems (2612V045) Technical Cybernetics P Czech Ostrava Choice-compulsory study plan
2008/2009 (P2612) Electrical Engineering and Computer Science (2612V015) Electronics K Czech Ostrava Choice-compulsory study plan
2008/2009 (P2645) Electrical Engineering, Communication and Computer systems (2612V045) Technical Cybernetics K Czech Ostrava Choice-compulsory study plan
2008/2009 (P2645) Electrical Engineering, Communication and Computer systems (2612V015) Electronics K Czech Ostrava Choice-compulsory study plan
2007/2008 (P2645) Electrical Engineering, Communication and Computer systems (2612V015) Electronics P Czech Ostrava Choice-compulsory study plan
2007/2008 (P2645) Electrical Engineering, Communication and Computer systems (2612V045) Technical Cybernetics P Czech Ostrava Choice-compulsory study plan
2006/2007 (P2645) Electrical Engineering, Communication and Computer systems (2612V015) Electronics P Czech Ostrava Choice-compulsory study plan
2006/2007 (P2645) Electrical Engineering, Communication and Computer systems (2612V045) Technical Cybernetics P Czech Ostrava Choice-compulsory study plan
2005/2006 (P2645) Electrical Engineering, Communication and Computer systems (2612V015) Electronics P Czech Ostrava Choice-compulsory study plan
2005/2006 (P2645) Electrical Engineering, Communication and Computer systems (2612V045) Technical Cybernetics P Czech Ostrava Choice-compulsory study plan
2004/2005 (P2645) Electrical Engineering, Communication and Computer systems (2612V015) Electronics P Czech Ostrava Choice-compulsory study plan
2003/2004 (P2645) Electrical Engineering, Communication and Computer systems (2612V015) Electronics P Czech Ostrava Choice-compulsory study plan
2002/2003 (P2612) Electrical Engineering and Computer Science (2612V015) Electronics P Czech Ostrava Choice-compulsory study plan
2001/2002 (P2612) Electrical Engineering and Computer Science (2612V015) Electronics P Czech Ostrava Choice-compulsory study plan

Occurrence in special blocks

Block nameAcademic yearForm of studyStudy language YearWSType of blockBlock owner