455-0923/01 – Special Microelectronic Sensors (SMES)
| Gurantor department | Department of Measurement and Control | Credits | 0 |
| Subject guarantor | prof. Ing. Petr Bilík, Ph.D. | Subject version guarantor | prof. Ing. Petr Bilík, Ph.D. |
| Study level | postgraduate | Requirement | Choice-compulsory |
| Year | | Semester | winter + summer |
| | Study language | Czech |
| Year of introduction | 1998/1999 | Year of cancellation | 2009/2010 |
| Intended for the faculties | FEI | Intended for study types | Doctoral |
Subject aims expressed by acquired skills and competences
To acquire the student about the stormy developing group of sensors - microelectronicsensors.
Teaching methods
Individual consultations
Project work
Summary
Microelectronic sensor (MS) are characterized as sensor based upon phenomena which occur in the semiconductor and in the thin and thich films and are fabricated by microtechnology. They present the progresive dynamic developing type of sensor called as "the second generation sensor". This kind of sensors are compatibile with integrated circuit not only form the point of view of technology but of design that enable fully to utilize the possibilities opered by microelectronic (higher reliolility excelent performance, price ,new design solutions and nontraditional application). The subject is dedicated to the areas: Basic physical principles of MS properties and design of MS, MS technology and application of MS industry, medical and enviroment protection.
Compulsory literature:
MAY, G.S. Fundamentals of Semiconductor Fabrication. New York : Willey, 2007. 320 s. ISBN: 978-0-471-23279-7.
HUSÁK, M. Mikrosenzory a mikroaktuátory. Praha : Academia, 2008. 544 s. ISBN: 978-80-200-1478-8
Recommended literature:
Additional study materials
Way of continuous check of knowledge in the course of semester
E-learning
Other requirements
Prerequisities
Subject has no prerequisities.
Co-requisities
Subject has no co-requisities.
Subject syllabus:
Lectures:
Sensor as the primary source of information in measurement and control systems. Signal conversion in sensors.Clasification of sensors. The role of sensor in measurement and control systems.
Microtechnology.Chemical and physical method for thin film preparation. Thermal diffusion and ion implantation. Lithography. Etching of layers. Planar technology. Micromaschining.
Microelectronic sensors (MS). MS sensor for mechanical, thermal, radiant, magnetic and chemical signals.
Processing of signal from sensors. Getting sensor information into MCU. Technique and system consideration. Linearization. Compensation.
Smart sensors. Using MCUs/DSPs to increase Sensor IQ.
Communication for Smart Sensors. Communication protocols. Industrial and sensor networks.
Conditions for subject completion
Occurrence in study plans
Occurrence in special blocks
Assessment of instruction
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