455-0923/01 – Special Microelectronic Sensors (SMES)

Gurantor departmentDepartment of Measurement and ControlCredits0
Subject guarantordoc. Ing. Petr Bilík, Ph.D.Subject version guarantordoc. Ing. Petr Bilík, Ph.D.
Study levelpostgraduateRequirementChoice-compulsory
YearSemesterwinter + summer
Study languageCzech
Year of introduction1998/1999Year of cancellation2009/2010
Intended for the facultiesFEIIntended for study typesDoctoral
Extent of instruction for forms of study
Form of studyWay of compl.Extent
Full-time Credit and Examination 2+0
Combined Credit and Examination 2+0

Subject aims expressed by acquired skills and competences

To acquire the student about the stormy developing group of sensors - microelectronicsensors.

Teaching methods

Individual consultations
Project work

Summary

Microelectronic sensor (MS) are characterized as sensor based upon phenomena which occur in the semiconductor and in the thin and thich films and are fabricated by microtechnology. They present the progresive dynamic developing type of sensor called as "the second generation sensor". This kind of sensors are compatibile with integrated circuit not only form the point of view of technology but of design that enable fully to utilize the possibilities opered by microelectronic (higher reliolility excelent performance, price ,new design solutions and nontraditional application). The subject is dedicated to the areas: Basic physical principles of MS properties and design of MS, MS technology and application of MS industry, medical and enviroment protection.

Compulsory literature:

MAY, G.S. Fundamentals of Semiconductor Fabrication. New York : Willey, 2007. 320 s. ISBN: 978-0-471-23279-7. HUSÁK, M. Mikrosenzory a mikroaktuátory. Praha : Academia, 2008. 544 s. ISBN: 978-80-200-1478-8

Recommended literature:

SZE, S.M. Semiconductor Sensors. New York : Willey, 1994. 576 s. ISBN: 978-0-471-54609-2 RANDY F. Understanding smart sensors. Boston, London : Artech House, 1996. 400 s. ISBN 0-89006-824-0 RISTIC, L. Sensor technology and Devices. Boston, London : Artech House, 1994. 524 s. ISBN 0-89006-532-2 GULDAN, A. Mikroelektronické senzory. Bratislava : Alfa, 1987. ZEHNULA, K. Čidla robotů. Praha : SNTL, 1990.

Way of continuous check of knowledge in the course of semester

E-learning

Další požadavky na studenta

Prerequisities

Subject has no prerequisities.

Co-requisities

Subject has no co-requisities.

Subject syllabus:

Lectures: Sensor as the primary source of information in measurement and control systems. Signal conversion in sensors.Clasification of sensors. The role of sensor in measurement and control systems. Microtechnology.Chemical and physical method for thin film preparation. Thermal diffusion and ion implantation. Lithography. Etching of layers. Planar technology. Micromaschining. Microelectronic sensors (MS). MS sensor for mechanical, thermal, radiant, magnetic and chemical signals. Processing of signal from sensors. Getting sensor information into MCU. Technique and system consideration. Linearization. Compensation. Smart sensors. Using MCUs/DSPs to increase Sensor IQ. Communication for Smart Sensors. Communication protocols. Industrial and sensor networks.

Conditions for subject completion

Full-time form (validity from: 1960/1961 Summer semester, validity until: 2012/2013 Summer semester)
Task nameType of taskMax. number of points
(act. for subtasks)
Min. number of points
Exercises evaluation and Examination Credit and Examination 100 (145) 51
        Examination Examination 100  0
        Exercises evaluation Credit 45  0
Mandatory attendence parzicipation:

Show history

Occurrence in study plans

Academic yearProgrammeField of studySpec.FormStudy language Tut. centreYearWSType of duty
2009/2010 (P2645) Electrical Engineering, Communication and Computer systems (2612V045) Technical Cybernetics P Czech Ostrava Choice-compulsory study plan
2009/2010 (P2645) Electrical Engineering, Communication and Computer systems (2612V045) Technical Cybernetics K Czech Ostrava Choice-compulsory study plan
2008/2009 (P2645) Electrical Engineering, Communication and Computer systems (2612V045) Technical Cybernetics P Czech Ostrava Choice-compulsory study plan
2008/2009 (P2645) Electrical Engineering, Communication and Computer systems (2612V045) Technical Cybernetics K Czech Ostrava Choice-compulsory study plan
2007/2008 (P2645) Electrical Engineering, Communication and Computer systems (2612V045) Technical Cybernetics P Czech Ostrava Choice-compulsory study plan
2006/2007 (P2645) Electrical Engineering, Communication and Computer systems (2612V045) Technical Cybernetics P Czech Ostrava Choice-compulsory study plan
2005/2006 (P2645) Electrical Engineering, Communication and Computer systems (2612V045) Technical Cybernetics P Czech Ostrava Choice-compulsory study plan
2004/2005 (P2645) Electrical Engineering, Communication and Computer systems (2612V045) Technical Cybernetics P Czech Ostrava Choice-compulsory study plan
2003/2004 (P2645) Electrical Engineering, Communication and Computer systems (2612V045) Technical Cybernetics P Czech Ostrava Choice-compulsory study plan
2002/2003 (P2612) Electrical Engineering and Computer Science (2612V045) Technical Cybernetics P Czech Ostrava Choice-compulsory study plan
2001/2002 (P2612) Electrical Engineering and Computer Science (2612V045) Technical Cybernetics P Czech Ostrava Choice-compulsory study plan

Occurrence in special blocks

Block nameAcademic yearForm of studyStudy language YearWSType of blockBlock owner