516-0943/01 – Optical Spectroscopy and Ellipsometry (OSE)
| Gurantor department | Institute of Physics | Credits | 0 |
| Subject guarantor | doc. Dr. Mgr. Kamil Postava | Subject version guarantor | doc. Dr. Mgr. Kamil Postava |
| Study level | postgraduate | Requirement | Optional |
| Year | | Semester | winter + summer |
| | Study language | Czech |
| Year of introduction | 2005/2006 | Year of cancellation | 2009/2010 |
| Intended for the faculties | HGF | Intended for study types | Doctoral |
Subject aims expressed by acquired skills and competences
Explain methods of optical spectroscopy and ellipsometry used for characterization of thin films, multilayers, periodic systems, composites, and nanostructures.
Classify basic methods - reflection and transmission spectroscopy in visible, near infrared and near ultraviolet spectral range, spectroscopic ellipsometry, Fourier transform infrared (FTIR) spectroscopy and magneto-optical spectroscopy.
Teaching methods
Lectures
Individual consultations
Summary
The main target of the course are methods of optical spectroscopy and
ellipsometry used for characterization of thin films, multilayers, periodic
systems, composites, and nanostructures. The course includes fundamentals of
optical spectroscopy and ellipsometry, measurement configurations, interaction
of light with metals, semiconductor, and dielectrics. Modeling of light
reflection and transmission from multilayers, periodic gratings, and composite
systems is completed by fitting of experimental data using optimization
techniques. Effects of anisotropy, surface roughness, depolarization, and
component imperfections are discussed. The course is mainly focused on
reflection and transmission spectroscopy in visible, near infrared and near
ultraviolet spectral range, spectroscopic ellipsometry, Fourier transform
infrared (FTIR) spectroscopy and magneto-optical spectroscopy.
Compulsory literature:
1. S. Svanberg, Atomic and molecular spectroscopy: basic aspects and
practical applications, Springer-Verlag, Berlin 1991.
2. D. S. Kliger, J. W. Lewis, C. E. Randall, Polarized light in optics and
spectroscopy, Academic Press, New York 1990.
3. R. M. A. Azzam, N. M. Bashara, Ellipsometry and polarized light, North-
Holland, Amsterdam 1977.
Recommended literature:
1. I. Ohlídal, D. Franta, Ellipsometry of thin film systems, In: Progress in
Optics, Vol. 41, Ed. E. Wolf, 2000.
2. H. Tompkins and E. Irene, Handbook of Ellipsometry, William Andrew 2005.
1. Proceedings from ICSE conferences: Thin Solid Films Vol. 234 (1993),
Vol. 290-291 (1996), Vol. 455-456 (2004)
Way of continuous check of knowledge in the course of semester
E-learning
Other requirements
Prerequisities
Subject has no prerequisities.
Co-requisities
Subject has no co-requisities.
Subject syllabus:
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Conditions for subject completion
Occurrence in study plans
Occurrence in special blocks
Assessment of instruction
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