516-0943/02 – Optical Spectroscopy and Ellipsometry (OSE)
| Gurantor department | Institute of Physics | Credits | 10 |
| Subject guarantor | doc. Dr. Mgr. Kamil Postava | Subject version guarantor | doc. Dr. Mgr. Kamil Postava |
| Study level | postgraduate | Requirement | Choice-compulsory |
| Year | | Semester | winter + summer |
| | Study language | Czech |
| Year of introduction | 2003/2004 | Year of cancellation | 2015/2016 |
| Intended for the faculties | HGF | Intended for study types | Doctoral |
Subject aims expressed by acquired skills and competences
Explain methods of optical spectroscopy and ellipsometry used for characterization of thin films, multilayers, periodic systems, composites, and nanostructures.
Classify basic methods - reflection and transmission spectroscopy in visible, near infrared and near ultraviolet spectral range, spectroscopic ellipsometry, Fourier transform infrared (FTIR) spectroscopy and magneto-optical spectroscopy.
Teaching methods
Lectures
Individual consultations
Summary
The main target of the course are methods of optical spectroscopy and
ellipsometry used for characterization of thin films, multilayers, periodic
systems, composites, and nanostructures. The course includes fundamentals of
optical spectroscopy and ellipsometry, measurement configurations, interaction
of light with metals, semiconductor, and dielectrics. Modeling of light
reflection and transmission from multilayers, periodic gratings, and composite
systems is completed by fitting of experimental data using optimization
techniques. Effects of anisotropy, surface roughness, depolarization, and
component imperfections are discussed. The course is mainly focused on
reflection and transmission spectroscopy in visible, near infrared and near
ultraviolet spectral range, spectroscopic ellipsometry, Fourier transform
infrared (FTIR) spectroscopy and magneto-optical spectroscopy.
Compulsory literature:
1. S. Svanberg, Atomic and molecular spectroscopy: basic aspects and
practical applications, Springer-Verlag, Berlin 1991.
2. D. S. Kliger, J. W. Lewis, C. E. Randall, Polarized light in optics and
spectroscopy, Academic Press, New York 1990.
3. R. M. A. Azzam, N. M. Bashara, Ellipsometry and polarized light, North-
Holland, Amsterdam 1977.
Recommended literature:
1. I. Ohlídal, D. Franta, Ellipsometry of thin film systems, In: Progress in
Optics, Vol. 41, Ed. E. Wolf, 2000.
2. H. Tompkins and E. Irene, Handbook of Ellipsometry, William Andrew 2005.
1. Proceedings from ICSE conferences: Thin Solid Films Vol. 234 (1993),
Vol. 290-291 (1996), Vol. 455-456 (2004)
Additional study materials
Way of continuous check of knowledge in the course of semester
E-learning
Other requirements
individual systematic study
Prerequisities
Subject has no prerequisities.
Co-requisities
Subject has no co-requisities.
Subject syllabus:
1. Physical principles of optical spectroscopy and ellipsometry
- Electron transitions and the origin of the spectral dependences of the optical parameters
- Modeling of dielectric function of materials
- Kramers-Kronig dispersion relation, the relation of absorption and dispersion
- Spectral device (dispersive prism, grating, Fabry-Perot
interferometer)
- Selected parts of optical thin films
- Methods of effective environments and their use in optical spectroscopy
2. REFLECTION AND TRANSMISSION spectroscopy in the visible, near-ultraviolet
A near-infrared
- Components of spectrometers, the two-spectrometer
- Materials used in optical spectroscopy
- Resolution limit and instrumentation functions monochromator
- Superstructure instruments for measuring reflection spectra, integrating sphere
3. Spectroscopic ellipsometry
- Methods of ellipsometry, the ellipsometric measurement angles psi and delta, generalized
ellipsometry
- Type ellipsometer (zero ellipsometry, polarization modulation,
rotating analyzer and rotating compensator)
- Methods of averaging and error compensation
- Methods of ellipsometric data
4. Spectroscopy in the mid-infrared
- The physical origin of the infrared absorption spectrum characteristic vibrational
- The principle of using a Fourier transform spectrometer (FTIR)
- Modeling of the absorption maxima, chemical analysis
5. Magneto-optical spectroscopy
- The origin of magneto-optical phenomena, Kerr, Faraday and magneto Voightův
phenomenon
- Cutting magneto phenomena according to the direction of magnetization
- Specifics of magneto-optical ellipsometer
6. MODERN AND ADDITIONAL GUIDELINES optical spectroscopy
- Emission spectroscopy
- Laser spectroscopy, photoluminescence and fluorescence spectroscopy,
Raman spectroscopy
- Spectroscopy with a time resolution
- Spectral measurements on ultrathin layers
- Periodic diffraction grating systems
7. APPLICATION optical spectroscopy and ellipsometry IN RESEARCH
A TECHNOLOGICAL PRACTICE
Conditions for subject completion
Occurrence in study plans
Occurrence in special blocks
Assessment of instruction
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