9360-0500/01 – Thin Films (TV)
| Gurantor department | CNT - Nanotechnology Centre | Credits | 4 |
| Subject guarantor | doc. Dr. Mgr. Kamil Postava | Subject version guarantor | doc. Dr. Mgr. Kamil Postava |
| Study level | undergraduate or graduate | Requirement | Choice-compulsory |
| Year | 3 | Semester | winter |
| | Study language | Czech |
| Year of introduction | 2018/2019 | Year of cancellation | 2022/2023 |
| Intended for the faculties | USP, HGF | Intended for study types | Bachelor |
Subject aims expressed by acquired skills and competences
Explain physical properties of thin films (optical, electric, and magnetic properties)
Analyze the applications (for example antireflection coatings, thin film interference filters, etc.)
Teaching methods
Lectures
Tutorials
Summary
Předmět se zabývá fyzikálními vlastnostmi a aplikacemi tenkých vrstev. Pozornost je zaměřena na optické, elektrické a magnetické vlastnosti tenkých vrstev. Důraz je kladen na aplikační výstupy, např. antireflexní vrstvy, tenkovrstvé interferenční filtry, vrstvy využívané v polovodičovém průmyslu a informačních technologiích.
Compulsory literature:
OHRING, M., The material science of thin films, Academic Press, 1992.
MACLEOD, H. A.: Thin-film optical filters, 2nd ed. Bristol, 1986;
YEH, P.: Optical waves in layered media, Willey, New York 1988;
Recommended literature:
LUTH, H., Solid surfaces, interfaces and thin films, Springer, Berlin 2001.
AZZAM, R. M. A., BASHARA, N. M.: Ellipsometry and polarized light, North-Holland, Amsterdam, 1977;
Way of continuous check of knowledge in the course of semester
E-learning
Other requirements
Systematic off-class preparation.
Prerequisities
Subject has no prerequisities.
Co-requisities
Subject has no co-requisities.
Subject syllabus:
Contents:
- Introduction to methods of thin film preparation and characterization.
- Optics of thin films - electromagnetic theory of light propagation in thin and thick layers, phenomena at interfaces, matrix description of isotropic and anisotropic layered media
- Optical multilayer filters - anti-reflection systems, bandpass filters,
thin-film beamsplitters, narrow-band pass Fabry-Perot filters.
- Electrical properties of thin films - conductivity of thin layers, transport
phenomena, thin films of semiconductors and dielectrics, semiconductors and semiconductor and metal interfaces.
- Application of thin layers in semiconductor industry and technology
ultra-high integration, measurement of electrical parameters of thin layers.
- Magnetic properties of thin films - ferromagnetic thin films,
magnetic anisotropy, applications in magnetic recording and sensors.
Conditions for subject completion
Occurrence in study plans
Occurrence in special blocks
Assessment of instruction